Method for examining a sample, and device for carrying out such a method

ABSTRACT

A method for the examination of a sample includes illuminating the sample in a sample plane along a sample line with an illuminating light beam. The sample is acted upon by a depletion or switching light beam, which overlaps in the sample plane in an overlap region with the illuminating light beam. Part of fluorescent light emanating from the sample plane is detected as detection light originating from a first subregion of the overlap region, in which the probability of an interaction of the sample molecules with the depletion or switching light beam is greater than 90%, and/or originating from a second subregion which is at least partially surrounded by the first sub-region and/or in which the depletion or switching light beam has a zero point, while at the same time the fluorescent light originating from outside the first subregion and the second subregion is suppressed and not detected.

CROSS-REFERENCE TO PRIOR APPLICATIONS

This application is a U.S. National Stage Application under 35 U.S.C. §371 of International Application No. PCT/EP2017/066833 filed on Jul. 5,2017, and claims benefit to Luxembourgian Patent Application No. LU93143, filed on Jul. 6, 2016. The International Application waspublished in German on Jan. 11, 2018, as WO 2018/007469 A2 under PCTArticle 21(2).

FIELD

The invention relates to methods for examining a sample and to a devicefor carrying out such a method.

The invention also relates to a device which is designed to examine asample and which comprises at least one light source for generating anilluminating light beam having at least one suitable wavelength forfluorescence excitation of the sample, and for generating a depletion orswitching light beam, which includes at least one suitable wavelengthfor the depletion of the sample and which includes at least oneillumination objective for focusing the illuminating light beam and thedepletion or switching light beam.

BACKGROUND

SPIM (single plane illumination microscopy) technology, whereinillumination of the sample takes place in layers allows faster and moresample-sparing acquisition of image data than, for example, in apoint-by-point scanning of a sample. One known field of application ofSPIM technology is the field of fluorescence microscopy, whereinfluorophores in the sample are excited with laser light. In the case ofSPIM technology, excitation only takes place in only one of anillumination light sheet (also called “light strip”). Damage to thesample by illumination light in other planes is thereby avoided.

An optical device operating according to the SPIM method is described inDE 102 57 423 A1. In this microscope, a sample is illuminated with athin light sheet, while observation takes place from a directionperpendicular to the plane of the illuminating light sheet. Here, theillumination and the detection are made via two separate optical beampaths, each with separate optics. The light sheet is produced by acylindrical lens. For image acquisition, the sample is moved through thelight sheet which is fixed with respect to the detector to record inlayers fluorescence and/or scattered light with a plane detector. Thelayer image data thus obtained can subsequently be combined to form adata set corresponding to a three-dimensional image of the sample.

From DE 10 2010 060 121 A1, a SPIM microscope is known which is providedwith a y-directional illumination source and a z-directional detectionlight camera. An x-scanner generates a sequential light sheet byscanning the illuminating light beam in the x-direction. The focallength of the illuminating light beam can be varied by means of anillumination optical system with a zoom lens arranged in the beam pathof the illuminating light beam. According to one embodiment, optionallya STED (Stimulated Emission Depletion) beam may be switched on, forwhich purpose a depletion light source is provided which transmits adepletion light beam from the y-direction onto the object to be imagedwhich thins out the sequentially generated light sheet in thez-direction whereby the depletion light beam which is laterally offsetto the illuminating light beam in the z-direction is transmitted to theobject and is scanned parallel to the illuminating light beam in thex-direction. Preferably, there is a depletion beam, which has beenchanged in its cross section so that it has 2 maxima, which has a zeropoint in front of and behind the center of the excitation beam seen inthe z-direction. However, it is also possible to provide two separatelaser beams as depletion beams, or to thin the light sheet on one sideonly, i.e. seen in the z-direction only to apply either before or behindthe excitation beam a depletion beam.

From DE 10 2009 044 983 A1 a microscope is known, which has anillumination device with which a light sheet for illuminating a samplearea is generated, which extends in the direction of an illuminationaxis of an illumination beam path and is in the direction of atransverse axis, which is transverse to the illumination axis,approximately plane. The microscope further comprises a detection devicefor detecting light emitted along a detection axis of a detection beampath from the sample area, whereby the illumination axis and detectionaxis as well as the transverse axis and detection axis being at anon-zero angle to each other, and further the detection device includesa detection lens in the detection beam path. In such a microscope, thedetection device also comprises a detection element from a front lens ofthe detection lens spatially separated and from this independentlyoptically adjustable by means of which the size of a detection imagefield is continuously variable, and/or by means of a detection focusplane in the sample area is continuously movable.

From Dean, K. & Fiolka, R., “Uniform and scalable light-sheets generatedby extended focusing”, Opt. Express 22, 26141-26152 (2014), a system isknown in which a thin, short illumination beam with a fast-tunable lensis pushed back and forth along the optical axis. Due to the lower depthof field of the beam this can be thinner, which is supposed to increasethe image contrast. However, since the out-of-focus region of the beamalso excites fluorescence, a slit aperture is used to achieve thedesired effect. This slit aperture runs collinear with the illuminationbeam in a conjugate plane in the detection beam path. Despite the use ofthe slit aperture, the increase in the image contrast is relativelysmall, in particular because a large amount of fluorescent light isdetected that was not excited by the focus of the illumination beam.

From Zong, W. et al. “Large-field high-resolution two-photon digitalscanned light-sheet microscopy” Cell Res. (2014), a similar microscopeis known, but there is a non-linear fluorescence excitation. Also, in CN104407436 such a microscope is described.

In Gao, L., “Extend the field of view of selective plan illuminationmicroscopy by tiling the excitation light sheet”, Opt. Express, 23,6102-6111 (2015) discloses shifting the light sheet generated by ascanned illumination beam in several, discrete steps along theillumination axis and then joining together the images obtained for eachstep. This method has the disadvantage that it takes a long time to takeseveral frames one after the other. Furthermore, the effective thicknessof the illuminated area is not uniform across the field of view alongthe propagation direction of the illumination beam. The illuminationbeam is always thinner in the middle of the individual images than atthe edge. The image composed of individual images thus consistsalternately of areas which were illuminated with a thinner and thickerlight beam, i.e. with higher and lower contrast.

From Fahrbach, F. O., Voigt, F. F., Schmid, B., Heimchen, F. & Huisken,J. Rapid 3D light-sheet microscopy with a tunable lens. Opt. Express 21,21010 (2013), it is known for fast imaging of volumes to rapidly move alight sheet along the detection axis and track the focal plane of thedetection optics with a tunable lens.

DE 10 2007 063 274 A1 discloses a microscope comprising an imagingobjective for imaging a sample on a detector and means for illuminatingthe sample with a light sheet in the focal plane of the imagingobjective, which contains a coherent light-emitting illumination source.In this microscope, the means for illumination comprise Bessel optics,which generate from the light beam at least two plane waves and providepropagation directions to the plane waves, whereby the propagationdirection of each of the plane waves includes an acute angle with eachof the focal planes, the amount for each of the plane waves is the same,so that the plane waves in the focal plane constructively interfere,whereby a light sheet is generated. Similarly, the means forillumination may also comprise an optical element with which arotationally symmetric Bessel beam is generated from the light beam forthe dynamic generation of a light sheet.

From DE 10 2008 009 216 A1 an apparatus and a method for spatiallyhigh-resolution imaging of a structure of a sample is known. The devicehas a diffraction-limited resolution volume with several differentstates of dye molecules which can be switched between, wherein at leastone state is fluorescent. The fluorescent light is collected with anobjective and imaged with an optical system on a spatially resolvingdetector, wherein the dye molecules in at least a part of the samplehave a distribution density which is greater than the inverse of thediffraction-limited resolution volume. The device also includes one ormore light sources for emitting a switching radiation to switch a firstsubset of the dye molecules in the sample, and for emitting anexcitation radiation to excite the first subset of the dye molecules. Atleast one of the light sources is arranged in such a way that itradiates through the sample and a switching and/or fluorescenceexcitation of the dye molecules takes place in the sample at least inone direction approximately perpendicular to the optical axis and inparticular in the focus of the objective, wherein advantageously theswitching is photo-activation or deactivation of the dye molecules andthe light source for switching and/or the light source for excitation,is a focusing arrangement for generating an extended, at least in onedirection, at least approximately perpendicular to the optical axis ofthe lens, linearly extended illumination region in the direction ofillumination.

From DE 10 2009 008 646 A1 a method is known for detecting a chromophoreon an area in a sample, in particular for imaging a concentration of thechromophore on the area in the sample. It is provided here that at leastthe area in the sample is irradiated with light having a first photoenergy which corresponds to a first transition of the chromophore to afirst state. At least an area in the vicinity of the area in the sampleis irradiated with light having a second photo energy corresponding to asecond transition of the chromophore to a second state, whereby theintensity of the second photo energy light in the area has a minimum. Asubset of the chromophore that is in the first state after irradiatingthe sample with first photo energy light and second photo energy lightis detected to detect the chromophore in the surface. The imaging opticsare arranged in particular perpendicular or substantially perpendicularto the surface.

From EP 2 444 832 A1 a SPIM microscope is known which is provided with ay-directional illumination source and a z-directional detection lightcamera. An x-scanner generates a sequential light sheet by scanning theilluminating light beam in the x-direction. By selective addition of aSTED depletion beam the light sheet can optionally thin and thusincrease the optical resolution. “Tunable Acoustic Gradient Index ofRefraction Lenses”, in short TAG lenses, can be used which provide avariable way to modulate the excitation beam. Such TAG lenses representan alternative method of creating a Bessel beam. In such TAG lenses, arefractive liquid is contained within a circular piezoelectric elementand is excited by an AC signal to produce an alternating refractiveindex in the liquid. Changes in the amplitude in the frequency of theexcitation signal allow a rapid change of the transmitted pattern.According to a further preferred embodiment of the invention, a phaseplate is provided which modulates the depletion light beam. Thedepletion beam can be modulated so that the excitation is only narrowedlaterally to obtain a thinner light sheet. For this purpose, one singlephase plate is sufficient. However, it is alternatively also possible tolimit the respective excitation point on all sides.

DE 20 2011 110 077 U1 discloses an arrangement for illuminating a samplein SPIM microscopy. The arrangement has a light source for generating alight beam, means for producing a light strip from the light beam, inparticular for substantially planar illumination of a sample in anillumination plane from at least one direction, at least one objectivehaving an optical system which is designed and intended for this purposedirectly or indirectly supplying detection light emanating from thesample to a detector, whereby the optics of the objective interacts withthe light strip, and a deflecting device downstream of the optics of theobjective for deflecting the light strip, whereby the strip of lightafter deflection is arranged to illuminate a sample in a non-zero angle,in particular a right angle, to the optical axis of the objective and/oris arranged in a non-parallel plane in an optical axis of the objective.

SUMMARY

In an embodiment, the present invention provides a method for theexamination of a sample. The sample is illuminated in a sample planealong a sample line with an illuminating light beam propagating alongthe sample line and having at least one wavelength suitable forfluorescence excitation of the sample. The sample is acted upon by adepletion or switching light beam, which overlaps in the sample plane inan overlap region at least partially spatially with the illuminatinglight beam and which has at least one wavelength suitable for depletionof the sample. Part of fluorescent light emanating from the sample planeis detected as detection light originating from a first subregion of theoverlap region, in which the probability of an interaction of the samplemolecules with the depletion or switching light beam is greater than90%, and/or originating from a second subregion which is at leastpartially surrounded by the first sub-region and/or in which thedepletion or switching light beam has a zero point, while at the sametime the fluorescent light originating from outside the first subregionand the second subregion is at least partially suppressed and notdetected.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be described in even greater detail belowbased on the exemplary figures. The invention is not limited to theexemplary embodiments. All features described and/or illustrated hereincan be used alone or combined in different combinations in embodimentsof the invention. The features and advantages of various embodiments ofthe present invention will become apparent by reading the followingdetailed description with reference to the attached drawings whichillustrate the following:

FIG. 1 shows a schematic representation of an exemplary embodiment ofthe method according to the invention with reference to a detailed viewof an exemplary embodiment of a device according to the invention,

FIG. 2 shows a schematically the illumination of the pupil of theillumination objective to produce a sectioned Bessel beam with anopening angle of 10 degrees,

FIG. 3 shows a cross section through a sectioned Bessel beam for anopening angle of 10 degrees,

FIG. 4 shows schematically the illumination of the pupil of theillumination objective to produce a sectioned Bessel beam with anopening angle of 50 degrees,

FIG. 5 shows a cross section through a Sectioned Bessel beam for anopening angle of 50 degrees,

FIG. 6 shows schematically the illumination of the pupil of theillumination objective to produce a sectioned Bessel beam with anopening angle of 90 degrees,

FIG. 7 shows a cross section through a sectioned Bessel beam for anopening angle of 90 degrees,

FIG. 8 shows the detection probability projected along the illuminationaxis,

FIG. 9 shows a schematic representation of the superposition of aGaussian illuminating light beam with a depletion or switching lightbeam having two laterally offset maxima,

FIG. 10 shows a schematic representation of the superimposition of anilluminating light beam having a several maxima with a depletion orswitching light beam having a several maxima,

FIG. 11 shows a schematic representation of the superposition of anilluminating light beam with a depletion or switching light beam bothbeing formed as Bessel beams,

FIG. 12 shows a schematic representation of the superposition of anilluminating light beam with a depletion or switching light beam beingformed as crossed and sectioned Bessel beams,

FIG. 13 shows a schematic representation of the superimposition of across sectioned Bessel beam formed illuminating light beam with adepletion or switching light beam having a central minimum,

FIGS. 14 and 15 show a schematic illustration of a conventionaldetection in SPIM, wherein, however, an illuminating light beam in theform of a sectioned Bessel beam is advantageously used for illumination,

FIGS. 16 and 17 show a schematic example illustrating a confocal linedetection in SPIM, as it can be used in carrying out a method accordingto the invention,

FIGS. 18 and 19 show a further schematic example illustrating adetection in SPIM, as it can be used in carrying out a method accordingto the invention,

FIG. 20 shows a schematic illustration of the principle of a confocalline detection, as it can be used for carrying out a method according tothe invention, in the illumination of a sample line by means of anilluminating light beam having a long-drawn focus.

FIG. 21 shows a schematic illustration of the principle of a confocalline detection, as it can be used for carrying out a method according tothe invention, in the illumination of a sample line by means of anilluminating light beam having a short focus which is moved back and/orforwards during the detection in the direction of the light propagationdirection.

FIG. 22 shows a schematic representation of the detection in the case ofillumination with a long-drawn focus,

FIG. 23 shows a schematic representation of the detection in the case ofillumination with a short focus,

FIG. 24 shows a schematic representation of the detection in the case ofillumination with a short but laterally particularly wide focus,

FIGS. 25, 26 and 27 show a schematic representation of the intensitydistributions of the excitation light and the depletion or switchinglight and the resulting fluorescence in a cross section along the lightpropagation direction to explain an embodiment of the invention,

FIG. 28 shows a schematic representation of the intensity distributionsof the excitation light and the depletion or switching light in a crosssection perpendicular to the light propagation direction in front of thefocus,

FIG. 29 shows a schematic representation of the intensity distributionsof the excitation light and the depletion or switching light in a crosssection perpendicular to the light propagation direction in the focus,

FIG. 30 shows a schematic representation of the intensity distributionsof the excitation light and the depletion or switching light in a crosssection perpendicular to the light propagation direction behind thefocus,

FIG. 31 shows a schematic representation of a transverse cross sectionof the superposition of an illuminating light beam with a depletion orswitching light beam according to the prior art (STED-SPIM),

FIG. 32 shows a schematic representation of the STED efficiency atdifferent positions, namely in front of the location of the minimum beamradius (z<0).

FIG. 33 shows an illustration of the intensity distribution ofilluminating light beams and depletion or switching light beams at thelocation of the minimum beam radius (z=0),

FIG. 34 shows an illustration of the intensity distribution ofilluminating light beams and depletion or switching light beams afterthe location of the minimum beam radius (z>0),

FIG. 35 shows a schematic illustration of the illumination in an exampleof an embodiment according to the invention,

FIG. 36 shows schematically a graphical representation of the controlsignal for moving the overlap area, wherein the position of theilluminating light beam is additionally modulated to the moving, and

FIGS. 37 and 38 show an illustration of the spatial position change ofthe illuminating light beam due to the additional modulation.

DETAILED DESCIPTION

In an embodiment, the present invention provides a method which enablesthe generation of a high-contrast image of a thin layer of a sample.

An embodiment of the method is characterized in that:

-   -   a. the sample is illuminated in a sample plane along a sample        line with an illuminating light beam propagating along the        sample line and having at least one wavelength suitable for        fluorescence excitation of the sample, and that    -   b. the sample is acted upon by a depletion or switching light        beam, which overlaps in the sample plane in an overlap region at        least partially spatially with the illuminating light beam and        which has at least one wavelength suitable for depletion of the        sample, and    -   c. the part of the fluorescence light emanating from the sample        plane is detected as detection light originating from a first        subregion of the overlap region, in which the probability of an        interaction of the sample molecules with the depletion or        switching light beam is greater than 90%, in particular greater        than 95%, very particularly greater than 99%, and/or originating        from a second subregion which is at least partially surrounded        by the first sub-region and/or in which the depletion or        switching light beam has a zero point, while at the same time        the fluorescent light originating from outside the first        subregion and the second subregion is at least partially        suppressed and not detected.

In another embodiment, the present invention provides a device for theexamining of a sample which enables the production of a high contrastimage of a thin layer of a sample.

An embodiment of the device, which is of the aforementioned type, ischaracterized in that the illuminating light beam and the depletion orswitching light beam are guided such that a sample to be examined isilluminated in a sample plane along a sample line with the illuminatinglight beam propagating along the sample line and the depletion orswitching light beam in the sample plane overlaps at least partiallyspatially with the illuminating light beam, and that there is detectionoptics, which includes a detection objective, and which images thedetection light emanating from the sample area illuminated by theilluminating light beam along the sample line to a detection plane, inwhich a detector is arranged which detects the portion of thefluorescence emitted by the sample plane as a detection lightoriginating from a first subregion of the overlap region in which theprobability of an interaction of the sample molecules with the depletionor switching light beam is greater than 90%, in particular greater than95%, very particularly greater than 99%, and/or originates from a secondsubregion, which is surrounded by the first subregion at least insections and/or in the depletion or switching light beam has a zeropoint, while the detector simultaneously at least partially suppressesand does not detect the fluorescent light originating from outside thefirst subregion and the second subregion. In particular, the secondsubregion could be the region including and around the zero point of thedepletion beam, in which the interaction probability of a molecule withthe switching light beam is less than 10%, 5%, 1%. A sample line in thesense of the present invention is to be understood as meaning also, inparticular, a sample strip which may have a predeterminable extenttransverse to its longitudinal direction.

In accordance with the invention, it has also been recognized thateffective suppression of fluorescence by means of STED requires anextremely high intensity of the light power of the depletion light beam,so that depletion must be concentrated to a spatially narrow region. Inparticular, it is not possible or even sensible to achieve the lightpower densities required for a sufficiently probable interaction of thedepletion or switching light beam with the sample molecules in theentire wider environment of the sample region from which fluorescentlight is to be detected. If this is not taken into account, only a veryslight improvement in resolution and/or damage to the sample will beachieved by means of the depletion light beam. It was further recognizedthat therefore disturbing fluorescent light arises in this widerenvironment and reaches the detector, which in the result adverselyaffects the contrast of the image. Embodiments of the present inventionsuccessfully avoid this.

In particular, it has been recognized in the present invention thatefficient depletion of the ring structure in STED-SPIM application usingBessel beams cannot be realized. The suppression of fluorescence bymeans of long, weakly focused Gaussian beams is not very effective dueto the low intensity. This low efficiency is contrasted with a notinconsiderable burden on the sample by exposure to the depletion lightand the associated phototoxic effects.

It is usually so that only the fluorescent light is to be detected whichcomes from the area in which the depletion and/or switching light beamhas a zero point. Here, the second subregion is defined as including thearea in which the depletion or switching light beam has a zero pointcaused by diffraction and/or interference, wherein in the sense of thepresent invention, in particular, there is also a zero point when thelight power due to technical imperfections or scattering in the sampleis not exactly zero. In particular, the invention is based on the ideaof minimizing the number of fluorophores to be depleted. It is detectedin particular by the lateral and/or axial suppression of fluorescentlight originating from outside of the first and second subregion, sothat only ever detection light from the currently interesting area, suchas a narrow strip in the object along the illuminating light beam isdetected, which increases in particular image contrast. The secondsubregion may be surrounded in sections or also all around and/orcompletely surrounded by the first subregion in the sample plane to beexamined.

A particularly efficient possibility of combining STED/RESOLFT with SPIMin such a way that the depletion or switching light beam has to have acomparatively low power, is to use an illuminating light beam thatilluminates this narrow area/strip parallel to the illumination axis andin the illumination plane (light sheet plane) from the side so that theoverlap between excitation and detection PSF is minimized. As will bedescribed in detail below, the illumination can advantageously becarried out laterally (in particular along the scan direction) byso-called sectioned Bessel beams. A key advantage of such a combinationis that the depletion or switching light beam only has to be used todeplete a very small portion of the molecules, since the overlap ofdetection and excitation PSFs is very small. The few molecules to bedepleted are advantageously further away from the nominal focal plane ofthe detection objective than the desired axial resolution.

An embodiment of the invention advantageously leads to the fact that adetection of fluorescent light, which originates from regions too faraway from the focal plane of the detection objective, is largelysuppressed by masking. This can be done laterally or axially, asexplained in more detail below. In addition, the illumination ispreferably chosen so that the overlap of detection PSF and illuminationPSF is kept as small as possible, for example by illuminating a confocaldetected line from the side and/or aligning the optical axis of thedetection lens perpendicular to the sample plane. In addition, thefluorescent molecules in the overlap area and outside the illuminationPSF and detection PSF are depleted in the areas away from the focalplanes of the detection objective by the depletion or switching lightbeam, which further improves the optical sectioning and resolving power.

The illuminating light beam can be designed in particular as a Gaussianbeam or as a Bessel beam or as a sectioned Bessel beam or as a Mathieubeam. In a particular embodiment, it comprises at least one light sourcea light influencing means which generates a Bessel beam or a sectionedBessel beam or a Mathieu beam from a primary illumination beam, whichmay be, for example, a Gaussian beam emitted by a laser. For thispurpose, the light influencing means may include, for example, an SLM(spatial light modulator) or a combination of an axicon and a slitaperture.

The background of illumination using Bessel beams or sectioned Besselbeams is as follows:

Focusing the light passing through a ring aperture causes intensitymaxima along the optical axis in the region of the focus due toconstructive interference. In the longitudinal cross section, the areaof interference of the plane waves, which run from different directionsbut at substantially the same angle with respect to the optical axis, issubstantially diamond-shaped. A disturbance in a small area of thering-shaped illuminating light beam has almost no effect in the area ofthe focus on the optical axis, because all the illumination light thereinterferes. Suppression in a small area outside the optical axis hasthus almost no influence on the constructive interference. In the areasof focus with an axial distance to the optical axis, a disturbance inthe area of the incident light is “healed” in that the remaining lightbehind the disturbance covers a shadow cast by the disturbance.

A Bessel beam generated with an ring-shaped illumination of the pupil isrotationally symmetrical with respect to the optical axis. In addition,such a Bessel beam has intensity maxima in the form of concentric ringsin a cross section perpendicular to the optical axis, wherein thegreatest intensity maximum is located on the optical axis.

If one now suppresses segments of the annular illumination light, inparticular symmetrically, one shall speak of a “sectioned Bessel beam”.For example, one could use a ring aperture, in which additionally twomutually mirror-symmetrically opposite circumferential regions arecovered, or a ring aperture in combination with a slit aperture. Thelight then passes only through the two intermediate circumferentialregions of the ring aperture. The focus of such a “sectioned Besselbeam” is not rotationally symmetric in cross section perpendicular tothe optical axis. Rather, in such a “sectioned Bessel beam” parts of theoriginally ring-shaped intensity maxima are suppressed, so thatadjacent, to the optical axis concavely oriented curved intensitymaxima, namely ring segments referred to as “section rings”.

Preferably, at least part of the sample plane is scanned successively bymoving the overlapping area. In particular, it can advantageously beprovided that at least a part of the sample plane is successivelyscanned by moving the overlapping area by moving a focus of theilluminating light beam in the sample plane, wherein a focus of thedepletion or switching light beam is moved synchronously with the focusof the illuminating light beam.

For example, at least a part of the sample plane can be scannedsuccessively by moving a focus, in particular a comparatively shortfocus, of the illuminating light beam together with the focus of thedepletion or switching light beam in the light propagation direction,i.e. along the sample line. Here, a short focus is to be understood asmeaning that the focus is so strong that the depth of field of the beamachieved thereby does not correspond to the length of the entire stripto be imaged along the sample line and/or that the extent of the focusalong the detection axis is less than it would be for a beam, the depthof field of which corresponding to the extent of the imaged strip alongthe direction of illumination. As soon as the part of the sample planeto be examined has been traversed in this way, the process can berepeated continuously along the respectively adjacent sample line untilthe part of the sample plane to be examined has been scanned in twodimensions. In particular, in this embodiment, the detector may beformed as a slit detector, wherein the slit width direction is alignedparallel to the longitudinal extension direction of the image of thesample line in the detection plane. In this way, an axial suppression ofthe unwanted fluorescent light is achieved.

According to another example, at least a part of the sample plane can bescanned successively by moving a focus, in particular comparatively longfocus, of the illuminating light beam together with the focus ofdepletion or switching light beam perpendicular to the light propagationdirection, i.e. perpendicular to the sample line, until the part of thesample plane to be examined is scanned in two dimensions. In particular,in this embodiment, the detector may be formed as a slit detector,wherein the slit width direction is aligned perpendicular to thelongitudinal extension direction of the image of the sample line in thedetection plane. In this way, a lateral suppression of the unwantedfluorescent light is achieved.

In a particular embodiment of the method according to the invention, thedepletion or switching light beam has the same propagation direction asthe illuminating light beam. However, it is also possible for theilluminating light beam and the depletion or switching light beam tohave opposite propagation directions. In that regard, it may beadvantageously provided in general terms that the depletion or switchinglight beam has a direction of propagation parallel to the propagationdirection of the illuminating light beam.

Particularly good results can be achieved by means of an embodiment inwhich the depletion or switching light beam has a circular-symmetricalcross sectional profile or in which the depletion or switching lightbeam in cross section has two maxima which are arranged symmetricallyabout a zero point. In particular, it is in any case advantageous if thedepletion or switching light beam has a central zero point.

The depletion or switching light beam may advantageously be formed, forexample, from at least one Laguerre-Gaussian or Laguerre-Bessel beam.

As already mentioned, in a particularly advantageous embodiment at leastone planar part of the sample plane is scanned successively, sample linefor sample line, by moving the illuminating light beam in the sampleplane, in particular perpendicular to its propagation direction. Thedepletion or switching light beam is hereby moved synchronously with theilluminating light beam. In order to examine the entire image fieldsuccessively, the illuminating light beam can be moved together andsynchronously with the depletion or switching light beam during thedetection in the sample plane, in particular perpendicular to thepropagation direction of the illuminating light beam. In particular, theilluminating light beam may be moved continuously back and forthtogether and synchronously with the depletion or switching light beamduring detection in the illumination plane perpendicular to thepropagation direction of the illuminating light beam.

In particular for this purpose, in the device according to an embodimentof the invention, at least one illumination beam deflection device whichis adjustable with respect to the deflection angle may be arranged inthe beam path of the illuminating light beam, by means of which theilluminating light beam can be displaced relative to the sample in thesample plane, in particular perpendicular to its propagation direction.In this case, it can also be provided, in particular, that theillumination beam deflection device also deflects the depletion orswitching light beam, whereby a synchronous deflection of theilluminating light beam and the depletion or switching light beam isachieved in a simple manner. Alternatively, however, it is also possiblethat there is a further illumination beam deflection device whichdeflects the depletion or switching light beam synchronously with themovement of the illuminating light beam.

A particularly high resolution can be achieved in an embodiment of themethod according to the invention, in which the position of theilluminating light beam is in addition to the movement modulated in ahigh-frequency with a small-amplitude manner for a successive scanningof the sample plane. Specifically, for example, it may be provided thatthe position of the illuminating light beam is modulated in addition tothe movement necessary for a successive scanning of the sample plane ata frequency which is greater than three times t_(exp), where t_(exp) isthe exposure time of the detector. Advantageously, the amplitude of themodulation can be chosen such that it corresponds in the sample volumeat least λ/NA, in particular 3λ/NA, where λ is the wavelength of theillumination light and NA is the numerical aperture under which theilluminating light beam (1) is focused. In the case of asymmetricalfocusing, the amplitude can be selected advantageously such that itcorresponds in the sample volume to at least λ/NA_(x), in particular3λ/NA_(x), where Na_(x) is the amount of NA along the scan axis.

For this purpose, a modulator may be present, which is formed, forexample, in such a way that a modulation signal is additionallysuperimposed on an electrical drive signal for the illumination beamdeflection device, so that the illumination beam deflection device, inaddition to a successive movement of the illuminating light beam and thedepletion or switching light beam, also causes a high-frequency positionmodulation.

The device according to the invention may advantageously have a, inparticular electronic and/or computer-based, control device with whichthe position of the detector, in particular a slit detector, in thedetection plane and the position of the illuminating light beam and thedepletion and switching light beam in the illumination plane andoptionally the above-mentioned additional modulation of the position ofthe illuminating light beam is controlled.

The detection light is detected to realize a confocal line detectionusing a slit detector, wherein the slit width direction of the slitdetector is preferably aligned perpendicular to the longitudinaldirection of the image of the illumination strip in the detection plane.The slit detector can be designed in very different ways. Someembodiments of slit detectors which are particularly advantageous forcarrying out the method according to the invention are described below.

For example, the slit detector may be part of an area detector. In aparticularly advantageous embodiment, the slit detector is formed by therespectively switched active part of an area detector arranged in thedetection plane. The area detector may be, for example, a CMOS detectoror sCMOS detector.

For example, it is advantageously possible to read only a part of thearea detector, namely the part which currently corresponds to the slitdetector (switched active part), while the remaining parts of the areadetector, namely the parts which lie outside the slit detector, are notread out (switched inactive part).

In such an embodiment, mechanical components, such as a mechanical slitaperture, are avoided, which is particularly advantageous when it comesto move the slit detector, in particular synchronously to a movement ofthe illuminating light beam and the depletion or switching light beamand/or to a movement of the focus of the illuminating light beam and thefocus of the depletion or switching light beam in the detection plane.In such an embodiment, namely, the area detector can remain stationary,in particular relative to the detection objective and/or theillumination objective and/or the sample and/or relative to the incidentdetection light, wherein sequentially in time different parts of thesensor surface of the area detector, which then each form the slitdetector, are switched to be active in such a way that in each case onlythe detection light falling on the switched active part is detected,while detection light falling on the respectively switched inactiveparts of the area detector is not detected.

In particular, it can be advantageously provided that the activeswitching takes place continuously, so that in each case a range ofpixels switched active pass along the sensor simply uniformly andsynchronously to a movement of the illuminating light beam and thedepletion or switching light beam. The result is a spatiallyuninterrupted movement of the slit detector, without the need formechanical components to be moved. In that regard, such a design has theparticular advantage of a long life, because a movement-related wear,for example, of mechanical apertures is avoided.

In another, alternative embodiment, the slit detector has an areadetector arranged in the detection plane, for example a CMOS detector oran sCMOS detector, which is preceded by a slit aperture, in particularmechanical slit aperture, wherein the area detector is preferably alwaysswitched active with respect to its entire sensor surface. Inparticular, to be able to move the slit detector, this slit aperture canbe embodied, for example, by a mechanical shutter curtain, as is used inmirror reflex cameras. In this embodiment, the area detector can beactive with respect to its entire sensor area, in particular also whilethe slit aperture and/or the illuminating light beam and/or the focus ofthe illuminating light beam are moved.

Also, in an embodiment of the slit detector with a slit aperture, it canbe provided that the slit detector is moved in the detection planerelative to the incident detection light, in particular in the slitwidth direction or perpendicular to the slit width direction, inparticular by moving the slit aperture.

The slit aperture can also be designed to be particularly advantageousas a non-mechanical component. For example, as a sectionally switchablemirror/absorber e.g. based on liquid crystals. Such an embodiment can becombined with spectral filters particularly advantageously. The slitaperture can advantageously be moved, for example, by successivetranslucent switching and opaque switching of respectively adjacentparts of the SLM (spatial light modulator), as a result of which amoving aperture, in particular continuously moving aperture, isachieved.

As already mentioned, it can be advantageously provided that theilluminating light beam is moved together and synchronously with thedepletion or switching light beam during the detection in theillumination plane relative to the sample. For this purpose, forexample, a detection beam deflector adjustable with respect to thedeflection angle can be used. Such a detection beam deflection devicemay, for example, have at least one galvanometer mirror. In a devicewhich is constructed on the basis of a scanning microscope, for example,the already existing beam deflection device of the scanning microscope,in particular a confocal scanning microscope, can be used; this inparticular also if the device according to the invention is made byconversion of a scanning microscope or method of the invention iscarried out using a scanning microscope.

In an alternative embodiment, the detection light is deflected to a slitdetector fixed relative to the sample and/or relative to a detectionobjective by means of a detection beam deflection device which isarranged in the detection beam path and can be adjusted with respect tothe deflection angle and which is controlled synchronously with amovement of the illuminating light beam. This corresponds to a slitdetector with a de-scanning mirror, that is to say a scanning mirrorarranged in the detection beam path, which is synchronized with thescanning mirror in the illumination beam path such that the illuminatedline is imaged onto a stationary line sensor. In this case, however, thestructure can also be realized in such a way that one and the samemirror is used for both illumination and detection light, as a result ofwhich the synchronization is advantageously eliminated. The line sensorcan also comprise several pixel lines, in which case a step-by-stepscanning of the sample must take place.

In a very particularly advantageous embodiment, the focus of theilluminating light beam and/or the focus of the depletion or switchinglight beam are moved parallel to the propagation direction of theilluminating light beam and along the sample line during the detection.Such an embodiment makes it possible to scan the sample linesuccessively, in particular continuously, with a spatially very narrowand strongly focused focus of the illuminating light beam, which isoverlaid by a correspondingly narrow focus of the depletion or switchinglight beam, whereby an even further increased resolution can beachieved. Here, a narrow and strongly focused focus is to be understoodas meaning that the focusing is so strong that the depth of field of thebeam achieved thereby does not correspond to the length of the strip ofthe sample plane to be imaged and/or that the extent of the focus alongthe detection axis is less than it would be for a beam whose depth offield corresponds to the extent of the imaged strip along the directionof illumination.

In this case, in order to scan over a planar part of the sample plane,it can be provided that the illuminating light beam in the sample planeis moved successively, in particular perpendicular to its direction ofpropagation, and so at least a portion of the sample plane is scanned,sample line for sample line, wherein during scanning a sample line, thefocus of the illuminating light beam is moved along the respectivesample line.

In order to move the focus of the illuminating light beam and/or thefocus of the depletion or switching light beam during detection parallelto the propagation direction of the illuminating light beam and alongthe sample line, different approaches are possible, some of which willbe described in detail below by way of example.

For example, a focus moving device may have zoom optics or at least avariable focal length lens that allows the focus of the illuminationbeam and/or the focus of the depletion or switching light beam to bemoved parallel to the propagation direction of the illumination beam andalong the sample line during detection. Such a focus moving device hasthe advantage that the illumination objective can remain stationaryrelative to the sample, so that influencing of the sample by a relativemovement of the illumination objective, in particular when an immersionagent is used, is avoided.

In another embodiment, the focus of the illuminating light beam and/orthe focus of the depletion or switching light beam is moved by changingthe length of the optical path of the illuminating light beam, namely bychanging the geometric length of the light path and/or by changing arefractive index of an optical component arranged in the optical path.

In particular, a focus moving device may be present and configured andarranged to alter the refractive index in a portion of the light path inwhich the illumination light converges or diverges. It is also possiblethat a focus moving device may be configured and arranged to alter thegeometric light path in a section of the light path in which theillumination light converges or diverges.

For this purpose, a focus shifting device can in particular be connectedbehind the illumination objective and/or arranged spatially between theillumination objective and the sample. Such an embodiment does not relyon the installation space within a microscope stand, but advantageouslyuses the free space in front of the illumination objective and thus thelarge working distance of the illumination objectives usually used inlight-sheet microscopy. In particular, the ring of blocks or the annularelement described below can be arranged advantageously and space-savingcoaxially with the illumination objective, in particular in front of thefront lens of the illumination objective.

A change in the length of the light path can be achieved, for example,by means of an active mirror, which can be moved, for example, by apiezoelectric element. Alternatively, or additionally, the use of anacousto-optical element is possible. As a further alternative, it isalso possible to change the light path, optionally by the introductionof different optical elements with different thickness and/or differentoptical density in the beam path. It is also possible to use spatiallight modulators (SLM) or digital mirror devices (DMD) or deformablemirrors (DM) to change the light path.

In a particular embodiment, for changing the optical length of the lightpath of the illumination light, in particular by motor control,successive transparent blocks of different thickness and/or withdifferent refractive index are introduced into the light path. This canbe done, for example, in such a way that a block already introduced fora first movement of the light-sheet focus remains in the beam path andthat, for further movement, a further block is additionally introducedinto the beam path.

Alternatively, it is also possible, in particular, to realize a stepwisemovement of the illuminating light beam and/or of the focus of thedepletion or switching light beam in the axial direction by,successively and in exchange for one another, introducing blocks ofdifferent thicknesses and/or with different refractive indices into thelight path. A special for this purpose predestined focus movement devicecan have several blocks of different thicknesses and/or with differentrefractive indices.

Particularly precise and quickly adjustable is an embodiment designedfor this purpose, in which the blocks are interconnected forming an arcor a closed ring, wherein the arc or ring for changing the opticallength is turned, in particular about the optical axis or about an axisparallel to the optical axis. In this way, namely, each block located inthe beam path can be quickly exchanged for another block, wherein thethickness and/or refractive index of the irradiated portion of the ringdepends on the respective rotational position of the arc or ring.Preferably, the rotation is controlled by a motor.

The ring of the blocks may advantageously be formed, in particular, as astep ring with a thickness of the blocks increasing along a helicalline, which drops steeply from the thickest block to the thinnest blockafter a 360 degree rotation. With such an embodiment, the focus can bemoved relatively slowly in the direction of light propagation or againstthe direction of light propagation by a rotation of the step ring, inparticular a motor-controlled rotation, whereby a quick return followsthe slow movement before the slow movement operation repeats.

The blocks may be designed as blocks which can be separated in anon-destructive manner. Particularly robust and easy to handle is anembodiment in which the blocks are different areas of a bodymanufactured in one-piece.

Alternatively to the above-mentioned embodiments, it may also beprovided that an illuminated element is moved by the illuminating lightbeam and/or the depletion or switching light beam with a thickness,continuously increasing along a path, and/or a continuously increasingrefractive index for changing the optical length of the light pathrelative to the beam path of the illuminating light beam and/or thedepletion or switching light beam. The element may in particular bering-shaped and mounted so that it can be rotated so that the thicknessand/or the refractive index of each irradiated area depends on therotational position of the element. In particular, the element can bemounted so that it can be rotated about the optical axis or about anaxis parallel to the optical axis.

In a further alternative, two transparent wedge elements arranged in thebeam path of the illuminating light beam and/or the depletion orswitching light beam are moved relative to one another, in particularcontrolled by motor, to change the optical length of the light path. Inthis case, it can advantageously be provided in particular that one ofthe wedge elements has an entry surface and the other one of the wedgeelements has an exit surface for the illumination light, whereby theentry surface and the exit surface are arranged parallel to one another.The wedge elements can be in contact with each other in a contact plane,in particular via an immersion liquid, such as an oil immersion. Such anembodiment avoids beam offset between the incident and the emergentillumination light.

In a particularly advantageous embodiment, the focus of the illuminatinglight beam and/or the focus of the depletion or switching light beam aremoved by changing the length of the optical light path of theilluminating light beam or the depletion or switching light beam bymeans of a focus moving device having at least one adjusting arm, theoptical length of which is adjustable.

In particular, the focus moving device can have a polarization beamsplitter which allows the linearly polarized illuminating light beamcoming directly or indirectly from an illumination device to pass intoan adjusting arm which is closed by a deflection mirror and in which atube lens, a λ/4-plate and an objective are arranged. The deflectionmirror, which is arranged perpendicular to the propagation direction ofthe illuminating light beam, is mounted movable along the optical axis.The deflection mirror reflects back the illuminating light beam, so thatafter passing through the objective, the λ/4-plate and the tube lens, itpasses back to the polarization beam splitter. The illuminating lightbeam arriving at the polarization beam splitter has a linearpolarization direction rotated by 90 degrees due to passing through thecorrespondingly oriented λ/4-plate twice and is therefore reflected bythe polarization beam splitter to another tube lens, which is followedby the actual illumination objective. By moving the deflection mirror,the position of the focus in the illumination plane can be moved alongthe propagation direction of the illuminating light beam.

In a particularly advantageous alternative embodiment, the optical axisof the illumination objective and the optical axis of the detectionobjective are aligned parallel or coaxial to one another, wherein it isnevertheless preferably provided that the optical axis of the detectionobjective is oriented perpendicular to the sample plane, in which theilluminating light beam illuminating the sample line propagates.Alternatively, or additionally, it may also be provided that thedetection objective and the illumination objective are oriented oppositeto one another and opposite each other and/or that spatially in betweenthe detection objective and the illumination objective a sample holderis arranged, which defines an examination position for a sample to beexamined. Such a design has the particular advantage that the lightsheet microscope can be made particularly compact and robust, and thatthe examination position for the sample is particularly easy to access,so that a rapid and precise, successive transfer of the samples ispossible into the examination position.

Such a device can advantageously have a means of deflection, whichdeflects the illuminating light beam and/or the depletion or switchinglight beam after it has passed through the illumination objective insuch a way that they subsequently run in the sample plane. Inparticular, the means of deflection may be arranged such that thedeflected illuminating light beam and/or the depletion or switchinglight beam has an angle different from zero degrees to the optical axisof the illumination objective and/or the detection objective. Inparticular, the illumination and sample plane can be alignedperpendicular to the optical axis of the illumination objective.

In particular, it can be advantageously provided that the illuminatinglight beam and/or the depletion or switching light beam initially run inthe vertical direction through the illumination objective and then aredeflected in the horizontal direction with the deflection device inorder to illuminate the sample in the sample plane along the sampleline.

The detection light emanating from the illuminated sample area, inparticular fluorescent light, preferably runs in the vertical directionthrough a detection objective. Such a set-up allows the use of anupright or inverted standard microscope stand for the production of thedevice according to the invention.

In a particularly advantageous embodiment, it is provided that theillumination objective and the deflection device, which may comprise,for example, one or more deflection mirrors, are arranged to be movablerelative to one another in order to be able to move the illuminatinglight beam and/or the depletion or switching light beam relative to thesample. Alternatively, or additionally, it can also be provided that thedeflection device is fastened to the detection objective, in particularin a movable manner.

The device according to an embodiment of the invention mayadvantageously have a scanning microscope or a confocal scanningmicroscope and/or be manufactured by converting a scanning microscope ora confocal scanning microscope. In particular, the use of an invertedmicroscope stand is suitable. Of particular advantage in this respect isthe use of a (possibly already present in a laboratory anyway) scanningmicroscope for carrying out the method according to the invention.

In the drawing, the device according to an embodiment of the inventionis exemplified and shown schematically and will be described below withreference to the figures, wherein the same or the same elements orelements acting the same way are provided mainly with the same referencenumbers.

FIG. 1 shows a schematic representation of an exemplary embodiment ofthe method according to the invention with reference to a detailed viewof an exemplary embodiment of a device according to the invention.

The device includes at least one light source for generating anilluminating light beam 1 having at least one wavelength suitable forfluorescence excitation of the sample, and for generating a depletion orswitching light beam 6 having at least one wavelength suitable fordepletion of the sample. The device also includes an illuminationobjective 2 for focusing the illuminating light beam 1 and the depletionor switching light beam 6.

The illuminating light beam 1 and the depletion or switching light beam6 are guided such that a sample to be examined is illuminated in asample plane (with reference to FIG. 1, the sample plane is orientedhorizontally and perpendicular to the plane of the drawing) along asample line (referring to FIG. 1, the sample line is perpendicular tothe plane of the drawing) with the illuminating light beam 1 propagatingalong the sample line and the depletion or switching light beam 6 in thesample plane overlaps at least partially spatially with the illuminatinglight beam 1. Referring to FIG. 1, the propagation direction of theilluminating light beam 1 and the depletion or switching light beam 6are perpendicular to the plane of the drawing.

The device also includes detection optics which include a detectionobjective 4 and a tube lens 8 and which images detection light 7emanating from the sample area illuminated by the illuminating lightbeam 1 along the sample line into a detection plane in which a slitdetector 9 is arranged for a confocal line detection.

The slit detector 9 can be formed, in particular, by a part of an areadetector arranged in the detection plane which is switched active. Thearea detector may be, for example, a CMOS detector or sCMOS detector. Inthis case, only a part of the area detector, namely the part thatcorresponds to the slit detector 9, is read out (the part switchedactive), while the remaining parts of the area detector, namely theparts that are outside the slit detector, are not read (the partswitched not active).

In a first subregion 19, in which the probability of an interaction ofthe sample molecules with the depletion or switching light beam (6) isgreater than 90%, in particular greater than 95%, very particularlygreater than 99%, the fluorescence is effectively suppressed, so thatthe fluorescent light emanating from the central, actually interestingsecond subregion 20, which is surrounded by the first subregion 19 insections, is not superimposed with unwanted fluorescent light from thisfirst subregion 19. However, outside the first subregion 19, theintensity of the depletion or switching light beam 6 is not sufficientto effectively and reliably suppress interfering fluorescence. For thisreason, the light coming from the regions (23) marked out with hatchedlines in FIG. 1 is hidden and not detected by the slit detector.

In order to successively scan at least a portion of the sample plane,which represents the illumination plane, sample line for sample line,the illuminating light beam 1 is moved in the sample plane perpendicularto its propagation direction. With reference to FIG. 1, the movementtakes place in the horizontal direction. The depletion or switchinglight beam 6 is moved here synchronously with the illuminating lightbeam 1. For this purpose, the device comprises at least one illuminationbeam deflecting device which can be adjusted with respect to thedeflection angle in the beam path of the illuminating light beam 1 andthe depletion or switching light beam 6.

The illuminating light beam 1 is formed as a sectioned Bessel beam. Thedepletion or switching light beam 6 has two maxima in the transversecross section. If sectioned Bessel beams (see in particular FIGS. 2 to4) are used for illumination, the respectively detected sample line canbe illuminated, mainly, from the side. As a result, an overlap betweenthe detection and excitation PSF is advantageously greatly minimized andthe optical sectioning and the axial resolution are independent of thesize of the image field. This can be achieved, in particular, byaligning the optical axis of the detection objective perpendicular tothe illumination and sample plane.

A basic idea of the present invention is the combination ofSTED/Resolft-SPIM with the suppression of unwanted fluorescent light,for example by confocal line detection; this is advantageous inparticular with the simultaneous use of sectioned Bessel beams. Thisadvantageously minimizes the number of fluorophores to be depleted byusing another technique which requires less power, in addition to STED.

Confocal line detection only, during illumination with a sectionedBessel beam inherently has the limitation that the major maximum of asectioned Bessel beam is necessarily elongated along the optical axis,and thus the achievable resolution may be worse than with ordinaryBessel beams (even if the optical sectioning is significantly better).The central maximum of a sectioned Bessel beam is independent of thedepth of field of the beam and can therefore be easily chosen so that itis smaller than 2.4 μm. However, it can not be made smaller thanapproximately 0.6 μm for a numerical aperture of NA=0.4 (as opposed to a0.4 μm numerical aperture for conventional Bessel beams), withoutincreasing the overlap by increasing the opening angle β of the ringsystem of the Bessel beam with the detection PSF and therebydeteriorating the image contrast.

FIGS. 3, 5 and 7 each illustrate a cross section through a sectionedBessel beam as the illuminating light beam 1, as can be used to carryout a method according to the invention, for different opening angles.FIG. 3 shows a cross section through a sectioned Bessel beam for anopening angle of 10 degrees, FIG. 5 for an opening angle of 50 degreesand FIG. 7 for an opening angle of 90 degrees. FIG. 8 illustrates thedetection probability projected along the illumination axis.

FIG. 2 shows schematically the illumination of the pupil of theillumination objective to produce a sectioned Bessel beam with anopening angle of 10 degrees. The resulting intensity distribution is thefocus plane is shown in FIG. 3. FIG. 4 shows schematically theillumination of the pupil of the illumination objective to produce asectioned Bessel beam with an opening angle of 50 degrees. The resultingintensity distribution is the focus plane is shown in FIG. 5. FIG. 6shows schematically the illumination of the pupil of the illuminationobjective to produce a sectioned Bessel beam with an opening angle of 90degrees. The resulting intensity distribution is the focus plane isshown in FIG. 7.

FIGS. 9 to 13 each show a schematic representation of the superpositionof an illuminating light beam 1 with a depletion or switching light beam6, as can be used to carry out a method according to the invention.

FIG. 9 shows in a lateral cross section a schematic representation of apossible superposition of a Gaussian illuminating light beam 1 with adepletion or switching light beam 6 having two laterally offset maxima6.

FIG. 10 shows, in a lateral cross section, a schematic illustration of apossible superposition of an illuminating light beam 1 having severaladjacent maxima (horizontally next to one another in the figure), with adepletion or switching light beam 6, which also has several spaced-apartmaxima (vertically one above the other in the figure).

FIG. 11 shows, in a lateral cross section, a schematic illustration of apossible superimposition of an illuminating light beam 1, which isformed as a Bessel beam, with a depletion or switching light beam, whichis likewise designed as a Bessel beam.

FIG. 12 shows in a lateral cross section a schematic representation ofthe possible superposition of an illuminating light beam 1 with adepletion or switching light beam 6 being formed as crossed andsectioned Bessel beams or Mathieu beams.

FIG. 13 shows a schematic representation of the superimposition of anilluminating light beam which is formed as cross sectioned Bessel beamwith a depletion or switching light beam having a central minimum.

FIGS. 14 and 15 show a schematic illustration of a conventionaldetection in SPIM, wherein FIG. 14 shows the relationships in the x-yplane, while FIG. 15 shows the relationships in the y-z plane, wherebyadvantageously for illumination an illuminating light beam in the formof a sectioned Bessel beam is used.

The illuminating light beam 1 is focused by means of an illuminationobjective 2 to illuminate a sample line lying in the x-z plane. Thepropagation direction of the illuminating light beam 1 runs along thesample line. In order to scan a sample plane lying in the x-z plane, theilluminating light beam 1 is moved in the x-z plane and the sample planeis scanned successively sample line by sample line. The detection light7 emanating from the sample is collected by means of a detectionobjective 4 whose optical axis is oriented perpendicular to the sampleplane and imaged into a detection plane 5.

FIGS. 14 and 15 show a schematic illustration of a confocal linedetection in SPIM, as can be used when carrying out a method accordingto the invention. An improved resolution is already achieved becauseonly the area is detected in which the illuminating light beam deliversthe best axial resolution (ability to separate two pumps along theoptical axis) and the best optical sectioning (optical layer thickness,i.e. the width of the area around the focal plane from which much of thefluorescence is detected). Due to the additional superposition of thedepletion or switching light beam 6, an additional increase inresolution and contrast is achieved according to the invention, which isexplained in detail below, in particular with reference to FIG. 20.

FIGS. 16 and 17 illustrate schematically the principle of confocal linedetection in illumination along a sample line as may be used to performa method of the invention. The illumination takes place with anilluminating light beam 1, which has a long-drawn focus 11. From thesample area illuminated by the illuminating light beam 1 only the partof detection light is detected, which is emitted from a detection area10, which is defined by the width and the position of the slit detector9 which is arranged in the detection plane optically corresponding tothe sample plane.

The detection area 10 is chosen to be so large and aligned and arrangedin a way that it includes both a first subregion 19 in which theprobability of an interaction of the sample molecules with the depletionor switching light beam 6 is greater than 90%, in particular greaterthan 95%, very particularly greater than 99%, as well as a secondsubregion 20 surrounded by the first subregion 19 at least in sectionsand/or in which the depletion or switching light beam 6 has a zeropoint.

The slit width direction (with respect to the figure horizontally in thedrawing plane) of the slit detector 9 is aligned parallel to thelongitudinal direction of the image of the sample line in the detectionplane. Detection light emanating from sample areas which are outside thedetection area 10 defined by the slit detector 9 used are not detectedby the slit detector 9, so that disturbing fluorescent light originatingfrom areas where suppression by the depletion or switching light beam 6only is insufficiently possible, is not detected at least to aconsiderable extent. In the embodiment shown in FIGS. 16 and 17, lateralsuppression of unwanted fluorescent light takes place.

In this example, the slit detector 9 is part of an area detector 12.Specifically, the slit detector 12 is formed by a part of an areadetector 12 arranged in the detection plane which is switched active.The area detector may be, for example, a CMOS detector or sCMOSdetector. In each case, only the part of the area detector 12, whichjust corresponds to the slit detector, is read out (the part switchedactive), while the remaining parts of the area detector, namely theparts that are outside the slit detector 9, are not read (the partswitched inactive). Preferably, at least part of the sample plane isscanned successively by moving the overlapping area. By moving theoverlapping area of illuminating light beam 1 and depletion or switchinglight beam 6 perpendicular to the light propagation direction, thesample area of interest in the sample plane is scanned successively. Themovements of the illuminating light beam 1 and of the depletion orswitching light beam 6 which are executed are indicated by the arrows 3.

FIGS. 18 and 19 schematically illustrate another exemplary embodiment ofthe invention. In this exemplary embodiment, at least a part of thesample plane is scanned successively by moving a focus, in particularcomparatively short focus, of the illuminating light beam 1 togetherwith the focus of the depletion or switching light beam 6 in the lightpropagation direction, i.e. along the sample line.

Also, in this embodiment, only the part of fluorescent light originatingfrom a specific detection area 10 is detected from a sample areailluminated by the illuminating light beam 1, wherein the detection area10 is defined by the width and the position of a slit detector 9arranged in the detection plane optically corresponding to the sampleplane.

Also in this embodiment the detection area 10 is chosen to be so largeand aligned and arranged in a way that it includes both a firstsubregion 19 in which the probability of an interaction of the samplemolecules with the depletion or switching light beam 6 is greater than90%, in particular greater than 95%, very particularly greater than 99%,as well as a second subregion 20 surrounded by the first subregion 19 atleast in sections and/or in which the depletion or switching light beam6 has a zero point.

In this embodiment, the detector is designed as a slit detector 9 on thebasis of an area detector 12, wherein the slit width direction isaligned parallel to the longitudinal direction of the image of thesample line in the detection plane. In this way, an axial suppression ofunwanted fluorescent light is achieved.

As soon as the part of the sample plane to be examined has beentraversed along a sample line, the process can be repeated continuouslyalong the respectively adjacent sample line until the part of the sampleplane to be examined has been scanned in two dimensions.

FIG. 20 illustrates schematically the principle of confocal linedetection in illumination of a sample line as may be used to perform amethod of the invention. The illumination takes place with anilluminating light beam 1, which has a long-drawn focus 11. From thesample area illuminated by the illuminating light beam 1 only the partof detection light is detected, which is emitted from a detection area10, which is defined by the width and the position of the slit detector9 (not drawn in this figure). Detection light emanating from sampleareas which are outside the detection area 10 defined by the used slitdetector 9 are not detected by the slit detector 9.

FIG. 21 shows a schematic illustration of the principle of a confocalline detection, as it can be used for carrying out a method according tothe invention, wherein a sample line is illuminated by means of anilluminating light beam 1 which has a short focus 11. The focus 11 ismoved forward and/or backward during the detection in the direction ofthe light propagation. This embodiment allows to scan the sample linesuccessively, in particular continuously, with the radially spatiallyvery narrow focus 11 of the illuminating light beam 1, which issuperimposed with a correspondingly narrow focus of depletion orswitching light beam 6, whereby an even further increased resolution canbe achieved. In this case, advantage is taken of the fact that the focus11 can have a substantially small beam diameter in the beam waist(location of the smallest diameter) than the focus 11 in the embodimentaccording to FIG. 12.

FIG. 22 shows a schematic representation of the detection in the case ofillumination with an illuminating light beam 1 with a long-drawn focus11, as described above with reference to FIG. 12.

The detection optics images the detection light 7 emanating from theilluminated area into a detection plane (with reference to FIG. 14: theplane of the drawing) in which an area detector 12 is arranged. In thearea of the image 13 of the illuminated sample area, a slit detector 9is arranged which is formed by the respectively switched active part ofan area detector 12. The slit width direction of the slit detector 9 isaligned perpendicular to the longitudinal extension direction of theimage 13 of the illuminated sample area.

In order to successively scan at least a planar part of the sampleplane, sample line for sample line, the illuminating light beam 1 in thesample plane is moved perpendicular to its propagation direction andtogether with the depletion or switching light beam 6. Accordingly, theimage 13 of the illuminated sample area shifts in the detection plane,which is illustrated by the arrow 14. The slit detector 9 is movedsynchronously by appropriately activating and inactivating the pixels ofthe area detector 12, which is illustrated by the arrow 15.

FIG. 23 shows a schematic illustration of the detection in illuminationwith an illuminating light beam 1 with a short focus 11, as describedabove with reference to FIGS. 18 and 19. According to the axialdisplacement of the focus 11 of the illuminating light beam 1, the imageof the sample area illuminated by the focus 11 moved along thelongitudinal extension direction of the slit detector 9, which isillustrated by the double arrow 16. In this embodiment, the detector isformed preferably as a slit detector 9, wherein the slit width directionis aligned parallel to the longitudinal extension direction of the imageof the sample line in the detection plane. In this way, an axialsuppression of the unwanted fluorescent light is achieved. As soon asthe part of the sample plane to be examined has been traversed along asample line, the process can be repeated continuously along therespectively adjacent sample line until the part of the sample plane tobe examined has been scanned in two dimensions. The movement of theilluminating light beam 1 and the depletion or switching light beam 6 tothe next sample lines is indicated by the arrows 14 and 15.

FIG. 24 shows a schematic illustration of the detection in the case ofillumination with an illuminating light beam 1 with a short butlaterally very extensive focus 11 of the illuminating light beam 1 andthe depletion or switching light beam 6. In this embodiment, the regionof interest in the sample plane of the sample can be scanned by a singlescan along the sample line. Also, in this embodiment, the detector isformed preferably as a slit detector 9, wherein the slit width directionis aligned parallel to the longitudinal extension direction of the imageof the sample line in the detection plane.

FIGS. 25 to 27 show a schematic representation of the intensitydistributions of the excitation light beam 1 (FIG. 25) and the depletionor switching light beam 6 (FIG. 26) which has a zero point 22 along theoptical axis (z-axis), and the intensity distribution of the resultingfluorescence (FIG. 27) to illustrate a possible embodiment of theinvention.

There is no effective fluorescence suppression by STED in regions 18(drawn hatched) in front of and behind the beam waist, because the lightpower density is too low. Effective fluorescence suppression by STEDoccurs only in the first subregion 19.

In order to avoid that unwanted fluorescent light is detected togetherwith the actually to be detected fluorescent light, originating from asecond subregion 20, the fluorescent light emanating from the areas 18in front of and behind the beam waist is suppressed and not detected.

Rather, only the part of the fluorescence light emanating from thesample plane is detected as detection light, from a first subregion 19and a second subregion 20, which is surrounded at least in sections bythe first subregion 19, whereby fluorescence from the first subregion 19due to the high power density of the depletion or switching light beam 6is almost completely suppressed. The fluorescent light originating fromoutside the first subregion 19 and the second subregion 20 in the axialdirection is suppressed, for example with a slit detector. In theembodiment shown in FIG. 27, axial suppression of unwanted fluorescentlight thus takes place.

FIG. 31 shows a schematic representation of a transverse cross sectionof the superposition of an illuminating light beam with a depletion orswitching light beam according to the prior art (STED-SPIM). FIGS. 32 to34 show a schematic representation of the STED efficiency at differentpositions, namely before the location of the minimum beam radius (z<0)(FIG. 32), at the location of the minimum beam radius (z=0) (FIG. 33)and after the location of the minimum beam radius (z>0) (FIG. 34).

FIGS. 28 to 30 and 31 to 34 illustrate that for the examination of asample by means of a combination of STED and SPIM—seen alone—withGaussian illumination and especially in illumination with Bessel beams,disadvantageously an extremely high power of the depletion beam isnecessary in order to exceed a minimum intensity threshold 21 foreffective depletion.

In particular, the ring system can be depleted disadvantageously onlyvery difficult by a STED beam because the intensity in the depletionbeam is not sufficient. This is because the excitation beam has adiffraction-limited cross section that scales with the depth of field ofthe excitation beam. For Gaussian beams, the depth of field dz (Rayleighrange×2) is linked to the beam diameter. D=√(λdz/π) applies, where λ isthe wavelength in the medium. An image field of dz=50 μm is illuminatedby a beam, which is thus d=2.4 μm deep (1/e width) at the waist. Thedepletion area for a layer thickness of e.g. 0.1 μm is therefore 2.3 μmdeep.

Therefore, STED depletion away from the location of the narrowest beamdiameter (z=0) is extremely difficult to realize due to thediffraction-related beam expansion and concomitant reduction in lightpower density. It is therefore not possible to effectively conduct asample examination based solely on STED-SPIM with a long focus 11; noteven if the focus 11 is axially shortened and axially moved. Only thecombination according to the invention with a suppression of thefluorescent light, which originates from outside the first and secondsubregion, leads to be able to achieve a significantly higher resolutionwith good image contrast, which is illustrated in particular by FIG. 35.

FIG. 35 schematically illustrates the improvement of the axialresolution in the area of the beam waist 17 (location of the smallestbeam diameter) by the superimposition of a depletion or switching lightbeam 6 having a high power density there due to focusing, andadditionally the improvement by the suppression of the unwanteddetection light in the areas 18 in front of and behind the beam waist 17(location of the smallest beam diameter) by confocal line detection,which causes only detection light to be detected, which originates fromthe detection area 10. The focus 11 is moved forwards and/or backwardsduring the detection of a sample line in the direction of the lightpropagation in order to continuously scan the sample line, which isindicated by the double arrow. After scanning the sample line, the next,in particular the parallel adjacent, sample line can be scanned in thesame way and so on.

FIG. 36 schematically shows a graphical representation of the timeprofile of the drive signal for moving the overlapping area ofilluminating light beam 1 and depletion or switching light beam 6, inthe direction of the x-axis, wherein the position of the illuminatinglight beam is additionally modulated to the movement. The position ofthe illuminating light beam 1 is modulated in addition to moving theoverlapping area at a frequency greater than three times t_(exp), wheret_(exp) is the exposure time of the detector and having an amplitudeequal to λ/NAx in the sample volume, where λ is the Wavelength of theillumination light and NAx is the numerical aperture under which thex-direction is focused. As a result, the position of the 5 illuminatinglight beam 1 is additionally impressed with a wavering motion of λ/NAx(FIG. 37), so that the individual maxima of the illuminating light beam1 are effectively wider, as shown in FIG. 38.

While the invention has been illustrated and described in detail in thedrawings and foregoing description, such illustration and descriptionare to be considered illustrative or exemplary and not restrictive. Itwill be understood that changes and modifications may be made by thoseof ordinary skill within the scope of the following claims. Inparticular, the present invention covers further embodiments with anycombination of features from different embodiments described above andbelow. Additionally, statements made herein characterizing the inventionrefer to an embodiment of the invention and not necessarily allembodiments.

The terms used in the claims should be construed to have the broadestreasonable interpretation consistent with the foregoing description. Forexample, the use of the article “a” or “the” in introducing an elementshould not be interpreted as being exclusive of a plurality of elements.Likewise, the recitation of “or” should be interpreted as beinginclusive, such that the recitation of “A or B” is not exclusive of “Aand B,” unless it is clear from the context or the foregoing descriptionthat only one of A and B is intended. Further, the recitation of “atleast one of A, B and C” should be interpreted as one or more of a groupof elements consisting of A, B and C, and should not be interpreted asrequiring at least one of each of the listed elements A, B and C,regardless of whether A, B and C are related as categories or otherwise.Moreover, the recitation of “A, B and/or C” or “at least one of A, B orC” should be interpreted as including any singular entity from thelisted elements, e.g., A, any subset from the listed elements, e.g., Aand B, or the entire list of elements A, B and C.

LIST OF REFERENCE NUMERALS

-   1 Primary illuminating light beam-   2 Illumination objective-   3 Arrow-   4 Detection objective-   5 Detection plane-   6 Depletion or switching light distribution-   7 Detection light-   8 Tube lens-   9 Slit detector-   10 Detection area-   11 Focusing unit-   12 Area detector-   13 Image of the illuminated sample area-   14 Arrow-   15 Arrow-   16 Double arrow-   17 Beam waist-   18 Areas in front and behind the beam waist-   19 First subregion-   20 Second subregion-   21 Intensity threshold-   22 Zero point

The invention claimed is:
 1. A device configured to examine a sample,comprising: at least one light source configured to generate anilluminating light beam having at least one wavelength suitable forfluorescence excitation of the sample, and to generate a depletion orswitching light beam having at least one wavelength suitable fordepletion of the sample, and at least one illumination objectiveconfigured to focus the illuminating light beam and the depletion orswitching light beam, wherein the illuminating light beam and thedepletion or switching light beam are guidable in such a way that asample to be examined is illuminated in a sample plane along a sampleline with the illuminating light beam propagating along the sample lineand the depletion or switching light beam in the sample plane overlapsat least partially spatially in an overlapping area with theilluminating light beam, and wherein detection optics including adetection objective images detection light which originates from thesample area illuminated by the illuminating light beam along the sampleline, to a detection plane in which a detector is arranged, whichdetects the part of the fluorescent light outgoing from the sample planeas detection light, which comes from a first subregion of the overlaparea, in which the probability of interaction of the sample moleculeswith the depletion or switching light beam is greater than 90%, and/ororiginates from a second subregion which is surrounded by the firstsubregion at least partially and/or in which the depletion or switchinglight beam has a zero point, while the detector suppresses and does notdetect the fluorescent light from outside the first subregion and thesecond subregion at least partially simultaneously.
 2. The deviceaccording to claim 1, wherein: a. the illuminating light beam is one ofa Gaussian beam, a Bessel beam, a sectioned Bessel beam or a Mathieubeam, or b. the light source comprises an SLM (spatial light modulator)or a combination of an axicon and a slit aperture, which generates oneof a Bessel beam, a sectioned Bessel beam or a Mathieu beam from aprimary illuminating light beam.
 3. The device according to claim 1,wherein: a. the depletion or switching light distribution has the samepropagation direction as the illuminating light beam, and/or b. thedepletion or switching light distribution has a circular-symmetricalcross sectional profile or in cross section has two maxima, which arearranged symmetrically about a zero point, and/or c. the depletion orswitching light distribution is formed from at least oneLaguerre-Gaussian or Laguerre-Bessel beam.
 4. The device according toclaim 1, wherein the optical axis of the detection objective is alignedperpendicular to the sample plane.
 5. The device according to claim 1,wherein at least one illumination beam deflection device adjustable withrespect to a deflection angle is arranged in the beam path of theilluminating light beam, by which the illuminating light beam is movablein the sample plane relative to the sample.
 6. The A-device according toclaim 5, wherein the illumination beam deflecting device is configuredto deflect the depletion or switching light beam, or wherein the devicefurther comprises a further illumination beam deflecting deviceadjustable with respect to the deflection angle, which deflects thedepletion or switching light beam synchronously with the movement of theilluminating light beam.
 7. The 4-device according to claim 5, furthercomprising a modulator configured to detect a position of theilluminating light beam in addition to the movement with a frequencywhich is greater than three times texp, where texp is the exposure timeof the detector, and with an amplitude corresponding in the samplevolume at least λ/NA, where λ is the wavelength of the illuminationlight and NA is the numerical aperture under which the illuminatinglight beam is focused.
 8. The device according to claim 1, wherein thedetector is an area detector and the detection light is detected by arespectively switched active part of the area detector.
 9. The deviceaccording to claim 8, wherein: a. successively different parts of thearea detector are switchable to be active synchronously with themovement of the overlapping area, and/or b. the area detector iscontrollable such that its respective active part follows the movementof the image of the first and second subregion into the detection plane.10. The device according to claim 1, wherein the detector is a slitdetector.
 11. The device according to claim 10, wherein a slit widthdirection of the slit detector is aligned perpendicular to alongitudinal extension direction of the image of the sample line in thedetection plane.
 12. The device according to claim 10, wherein a slitwidth direction of the slit detector is aligned parallel to alongitudinal extension direction of the image of the sample line in thedetection plane.
 13. The device according to claim 10, wherein: a. theslit detector is movable in the illumination plane synchronously with amovement of the illuminating light beam, and/or b. the slit detector ismovable in the detection plane by successive active switching andinactive switching of respectively adjacent parts of an area detector.14. The device according to claim 10, wherein the slit detector ismovable in the detection plane in a direction of a slit width bysuccessive active switching and inactive switching of respectivelyadjacent parts of an area detector.
 15. The device according to claim10, wherein the slit detector has an area detector arranged in thedetection plane, in front of which there is a slit aperture.
 16. Thedevice according to claim 15, wherein the area detector is switchedactive with respect to its entire sensor area.
 17. The device accordingto claim 15, wherein the slit aperture is movable by a drive devicesynchronously with a movement of the illuminating light beam in theillumination plane.
 18. The A-device according to claim 15, wherein: a.the slit aperture is formed by a non-mechanical component, and/or b. theslit aperture has an SLM (spatial light modulator) and/or a sectionallyswitchable mirror or a sectionally switchable absorber, and/or c. theslit aperture is formed by the respectively translucent switched part ofan SLM (spatial light modulator).
 19. The A-device according to claim18, wherein the slit aperture is movable by successive translucentswitching and opaque switching of respective adjacent parts of the SLM(spatial light modulator).
 20. The device according to claim 15, furthercomprising a detection beam deflection device, which is adjustable withregard to a deflection angle and which is controllable synchronouslywith a movement of the illuminating light beam, configured to deflectthe detection light into the slit detector fixed relative to the sample.21. The device according to claim 1, further comprising a focus movingdevice configured to move a focus of the illuminating light beam and/ora focus of the depletion or switching light beam during the detectionparallel to a propagation direction of illuminating light beam and alongthe sample line.
 22. The device according to claim 21, wherein the focusmoving device has zoom optics and/or at least one lens with a variablefocal length.
 23. The device according to claim 21, wherein the focusmoving device has at least one means for changing the length of theoptical path of the illuminating light beam.
 24. The device according toclaim 23, wherein: a. the focus moving device is configured and arrangedto alter the refractive index in a portion of the light path in whichthe illumination light converges or diverges, and/or b. the focus movingdevice is configured and arranged to alter the geometric light path in aportion of the light path in which the illumination light converges ordiverges.
 25. The device according to claim 21, wherein the focus movingdevice comprises a plurality of transparent blocks of differentthickness and/or with different refractive index, which are selectivelyintroducible into the light path.
 26. The device according to claim 25,wherein the blocks are interconnected forming an arc or a closed ring.27. The device according to claim 26, wherein: a. the arc or ring isrotatably mounted, or b. the arc or ring is rotatably mounted about theoptical axis or about an axis parallel to the optical axis, or c. thearc or ring is rotatably mounted such that an optical thickness of anirradiated region depends on a turning position of the arc or ring. 28.The device according to claim 21, wherein the focus moving device has anelement which is illuminated by the illuminating light beam and/or thedepletion or switching light beam and has a continuously increasingthickness along a path and/or a continuously increasing refractiveindex.
 29. The device according to claim 28, wherein: a. the element ismounted so that it is movable linearly, or b. the element is rotatablymounted, or c. the element is rotatably mounted about the optical axisor about an axis parallel to the optical axis, or that d. the element isrotatably mounted such that an optical thickness of an irradiated regiondepends on a turning position of the element.
 30. The device accordingto claim 21, wherein: a. the focus moving device has two transparentwedge elements which are arranged in the beam path of the illuminationlight and/or the depletion and switching light and which are mounted soas to be movable relative to one another for varying the optical lengthof the light path, or b. the focus moving device has two transparentwedge elements which are arranged in the beam path of the illuminationlight and/or the depletion and switching light and which are in contactwith one another in a contact plane, via an immersion liquid, and whichare movable relative to one another for varying the optical length ofthe light path.
 31. The device according to claims 21, wherein: a. thefocus moving device is disposed behind the illumination objective,and/or b. the focus moving device is arranged spatially between theillumination objective and the sample.
 32. The device according to claim1, wherein the device is a scanning microscope or a confocal scanningmicroscope and/or the device is made by converting a scanning microscopeor a confocal scanning microscope.